|hSʯӢƷ˾λڴʯӢƷɢ-BƸЖ|h|hNSʯӢVƷλஔߣ_99.9%ɴ,|h
ʯӢԼ
ˮƷ
ʯӢɰʯӢʯӢƷ,ڴꑵЈ~ռ95%
ҹ˾1998ʯӢƷa(chn)н(jng)λҪa(chn)ƷʯӢʯӢpʯӢʯӢʯӢˮʯӢƬʯӢh(hun)ʯӢ塢ʯӢxNʯӢʯӢʯӢoʯӢ⾀гʯӢ⾀ԼNɫʯӢܵʯӢƷ
ʯӢܰNҎ(gu)⡢UV⾀ʯӢܼpʯӢֱ2-180mmں0.5-8mmL10-3000mmBʯӢÓuܡV⾀oܡͨB۹SiO2_99.6%γߴ硢W(wn)᷀(wn)ԡ׃ԺͿ܃(yu)W^_93%ϣÓuu10ppm(jng)^Óuu_5ppmmڸ߉cuȵua(chn)Ʒ;֮¹ˇa(chn)Ʒı棬ڰl(f)ӟhtܵ죻V⾀ܞVVЌwк190-320nmL⾀mڭh(hun)Դ죻ocV ⾀෴^253.7nmҲL⾀ǟo⾀ҪϣVڽеˮ̎ʳƷl(wi)Ț;
ʯӢƷʯӢʯӢݚʯӢܡʯӢˮʯӢƬʯӢ塢ʯӢh(hun)ʯӢʯӢxNʯӢʯӢܵȮʯӢܺ͵ͳʯӢ⾀NɫͲʯӢʯӢֱ8-120mm֮gІ_p_ڡA^ƽ^κ͔Uڡs߅ĥɰȼӹߜgԺüc,VʹˮOӟˮ̎uȮa(chn)Ʒͭh(hun)l(wi)I(lng)ʯӢݚҎ(gu)8-180mmΠ(j)͑ҪݚϿԽëMŚߜأԺҪJCJDH1-H7_߉cuȮa(chn)Ʒ;
ʯӢˮҪӡˢͰbӹI(y)---- UV̻, UV̻һNʮֿɿȡ՚
C\g(sh)Ĺ̻g(sh)ӡˢͰbӹI(y)ѽ(jng)õVͳʯӢ⾀ϵÇ(ni)Mg(sh)_l(f)®a(chn)ƷЧY(ji)(gu)·fLrܮa(chn)L253.7nmȏ⾀ݗ䏊100W/cm2,ÓǺ(DNA)^Ɖ@ĚЧ,l(wi)g(sh)Ҏ(gu)ָ˵Ҫ
҂Įa(chn)Ʒ|(zh)_ϣ˳Ҏ(gu)ҿԞ͑MЁDϼӹ
ҏSĮa(chn)Ʒ60Nև20Һ͵^(q)S\ź|(zh)пƼ(chung)l(f)չ҂÷dzŬȥM͑҂ø|(zh)̓rĮa(chn)Ʒ҂Ŀ͑҂Ŀ͑ڸЈϾиĸ